JPS6122032B2 - - Google Patents

Info

Publication number
JPS6122032B2
JPS6122032B2 JP55063297A JP6329780A JPS6122032B2 JP S6122032 B2 JPS6122032 B2 JP S6122032B2 JP 55063297 A JP55063297 A JP 55063297A JP 6329780 A JP6329780 A JP 6329780A JP S6122032 B2 JPS6122032 B2 JP S6122032B2
Authority
JP
Japan
Prior art keywords
electrode
plasma
reaction
reaction volume
volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55063297A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55154585A (en
Inventor
Jei Gorin Joruju
Teii Hotsugu Josefu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CollabRx Inc
Original Assignee
CollabRx Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CollabRx Inc filed Critical CollabRx Inc
Publication of JPS55154585A publication Critical patent/JPS55154585A/ja
Publication of JPS6122032B2 publication Critical patent/JPS6122032B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP6329780A 1979-05-18 1980-05-13 Plasma reactor Granted JPS55154585A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/040,604 US4209357A (en) 1979-05-18 1979-05-18 Plasma reactor apparatus

Publications (2)

Publication Number Publication Date
JPS55154585A JPS55154585A (en) 1980-12-02
JPS6122032B2 true JPS6122032B2 (en]) 1986-05-29

Family

ID=21911897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6329780A Granted JPS55154585A (en) 1979-05-18 1980-05-13 Plasma reactor

Country Status (4)

Country Link
US (1) US4209357A (en])
EP (1) EP0019370B1 (en])
JP (1) JPS55154585A (en])
DE (1) DE3064737D1 (en])

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